Joint Lab IHP - TH Wildau
Fertig prozessierter Si-Wafer

Joint Lab IHP - TH Wildau

Gemeinsame Veröffentlichungen des Joint Lab IHP - TH Wildau

2019

  • P. Steglich, C. Villringer, B. Dietzel, C. Mai, S. Schrader, M. Casalboni, A. Mai, "On-chip dispersion measurement of the quadratic electro-optic effect in nonlinear optical polymers using a photonic integrated circuit technology,” IEEE Photonics Journal, vol. 11, no. 3, pp. 1-10, June 2019.

  • Steglich P, Hülsemann M, Dietzel B, Mai A. "Optical Biosensors Based on Silicon-On-Insulator Ring Resonators: A Review". Molecules. 2019; 24(3):519.

  • Claus Villringer, Taravat S. Gilani, Edward Zhang, Silvio Pulwer, Patrick Steglich, Sigurd Schrader, and Jan Laufer "Development of tuneable Fabry-Pérot sensors for parallelised photoacoustic signal acquisition", Proc. SPIE 10878, Photons Plus Ultrasound: Imaging and Sensing 2019, 108780M (8 March 2019)

  • Silvio Pulwer, Richard Fiebelkorn, Christoph Zesch, Patrick Steglich, Claus Villringer, Franccesco Villasmunta, Egbert M. Gedat, Jan Handrich, Sigurd Schrader, and Ralf Vandenhouten "Endoscopic orientation by multimodal data fusion", Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII, 1093114 (4 March 2019)

  • Christoph Zesch, Silvio Pulwer, Patrick Steglich, Paolo Prosposito, Sigurd Schrader, and Hans Joachim Eichler "Raman lasers for trace gas detection (Conference Presentation)", Proc. SPIE 10902, Nonlinear Frequency Generation and Conversion: Materials and Devices XVIII, 109021E (4 March 2019)

  • Patrick Steglich, Marcel Hülsemann, Birgit Dietzel, Andreas Mai, "Optical Biosensors Based on Silicon-On-Insulator Ring Resonator: A Review," Preprints 2019, 2019010012

2018

  • Patrick Steglich, Christian Mai, Claus Villringer, Silvio Pulwer, Mauro Casalboni, Sigurd Schrader, and Andreas Mai, "Quadratic electro-optic effect in silicon-organic hybrid slot-waveguides," Opt. Lett. 43, 3598-3601 (2018)

  • P. Steglich, C. Mai, A. Peczek, F. Korndörfer, C. Villringer, B. Dietzel, A. Mai, "Quadratic electro-optical silicon-organic hybrid RF modulator in a photonic integrated circuit technology," 2018 IEEE International Electron Devices Meeting (IEDM), San Francisco, CA, 2018, pp. 23.3.1-23.3.4. (Selected Paper for Pre-Conference Publicity)

  • Bondarenko, S.; Villringer, C.; Steglich, P., "Comparative Study of Nano-Slot Silicon Waveguides Covered by Dye Doped and Undoped Polymer Cladding," Applied Sciences, 2019, 9, 89.

  • G. Alimonti, R. Ammendola, A. Andreazza, D. Badoni, V. Bonaiuto, M. Casalboni, F. De Matteis, A. Mai, G. Paoluzzi, P. Prosposito, A. Salamon, G. Salina, E. Santovetti, F. Sargeni, A. Satta, S. Schrader, P. Steglich, “Use of silicon photonics wavelength multiplexing techniques for fast parallel readout in high energy physics,” Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2018
  • Patrick Steglich, Viachaslau Ksianzou, Claus Villringer, Silvio Pulwer und Sigurd Schrader, „Theorie der Modenlinienspektroskopie zur optischen Charakterisierung von Polymerschichten“, Wiss Beitr TH Wildau 22:31–3, 2018, doi: 10.15771/0949-8214_2018_4
  • Claus Villringer, Taravat Saeb Gilani, Sara Gehauf, Clemens Wiedenhöft, Patrick Steglich, Silvio Pulwer, Maria Richetta, Sigurd Schrader, Jan Laufer, "Development of tunable Fabry-Pérot polymer film sensors for parellelised photoacoustic signal acquisition (Conference Presentation)", Proc. SPIE 10494, Photons Plus Ultrasound: Imaging and Sensing 2018, 1049421 (15 March 2018); doi: 10.1117/12.2290409
  • R. Ammendola, D. Badoni, V. Bonaiuto, M. Casalboni, A. Mai, F. De Matteis, P. Prosposito, A. Salamon, G. Salina, F. Sargeni, S. Schrader, and P. Steglich, „Use of silicon photonics wavelength multiplexing techniques for highly segmented pixel detectors readout”, Fotonica, Lecce, 2018

2017

  • Patrick Steglich, Claus Villringer, Silvio Pulwer, Friedhelm Heinrich, Joachim Bauer, Birgit Dietzel, Christian Mai, Andreas Mai, Mauro Casalboni, and Sigurd Schrader,
    "Hybrid-Waveguide Ring Resonator for Biochemical Sensing,"
    in IEEE Sensors Journal, vol. 17, no. 15, pp. 4781-4790, Aug.1, 1 2017.
  • P. Steglich, B. Dietzel, C. Villringer, S. Pulwer, A. Mai, C. Mai, M. Casalboni, S. Schrader, "SILICON-ORGANIC HYBRID RING RESONATOR: INVESTIGATION OF THE ELECTRO-OPTIC RESPONSE", 81st Prague Meeting on Macromolecules, Sep 2017
  • P. Steglich, B. Dietzel, C. Villringera, S. Pulwer, A. Mai, C. Mai, M. Casalboni, S. Schrader, "TARGETING FEMTO-JOULE ON-CHIP OPTICAL SWITCHES USING A SILICON-ORGANIC HYBRID RING RESONATOR", 81st Prague Meeting on Macromolecules, Sep 2017
  • C. Li, P. Steglich, B. Dietzel, C. Villringer, M. Klomsdorff, S. Pulwer, A. Mai, C. Mai, S. Schrader, "IMMOBILIZATION OF BIOTIN AND STREPTAVIDIN ON APTES FUNCTIONALIZED SILICON SURFACE FOR ON-CHIP PHOTONIC BIOSENSORS", 81st Prague Meeting on Macromolecules, Sep 2017
  • J. Bauer ; F. Heinrich ; O. Fursenko ; S. Marschmeyer ; A. Blümich ; S. Pulwer ; P. Steglich ; C. Villringer ; A. Mai ; S. Schrader, " Very high aspect ratio through silicon via reflectometry ", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103293J (June 26, 2017)
  • Fursenko, O., Lukosius, M., Lupina, G., Bauer, J., Villringer, C., & Mai, A.; "Development of graphene process control by industrial optical spectroscopy setup." Modeling Aspects in Optical Metrology VI. Vol. 10330. International Society for Optics and Photonics, 2017.

2016

  • Patrick Steglich, Silvio Pulwer, Claus Villringer, Joachim Bauer, Friedhelm Heinrich, Birgit Dietzel, Andreas Mai, Sigurd Schrader
    Photonic devices for future chip-integrated biosensors
    GIT Laboratory Journal Europe, pp 20-22, Aug 2016
  • Patrick Steglich, Christian Mai, David Stolarek, Stefan Lischke, Sebastian Kupijai, Claus Villringer, Silvio Pulwer, Friedhelm Heinrich, Joachim Bauer, Stefan Meister, Dieter Knoll, Mauro Casalboni, Sigurd Schrader
    Partially slotted silicon ring resonator covered with electro-optical polymer
    Proc. SPIE 9891, Silicon Photonics and Photonic Integrated Circuits V, 98910R (May 13, 2016); doi:10.1117/12.2217725
  • O. Fursenko, J. Bauer, S. Marschmeyer, 3D Through Silicon Via profile metrology based on spectroscopic reflectometry for SOI applications, Proc. of SPIE Vol. 9890, 15-6, 2016

2015

  • Steglich, P.; Mai, C.; Stolarek, D.; Lischke, S.; Kupijai, S.; Villringer, C.; Pulwer, S.; Heinrich, F.; Bauer, J.; Meister, S.; Knoll, D.; Casalboni, M.; Schrader, S.
    Novel Ring Resonator Combining Strong Field Confinement With High Optical Quality Factor
    Photonics Technology Letters, IEEE , vol.27, no.20, pp.2197-2200, Oct.15, 15 2015
  • Villringer, C., Lux, H., Steglich, P., Bauer, J., Dümecke, S., Schubert, M., and Schrader, S.
    Optical properties of highly transparent conductive uniaxial carbon films.
    ImagineNano 2015.
  • O. Fursenko, J. Bauer, S. Marschmeyer, H.-P. Stoll; Through silicon via profile metrology of Bosch etching process based on spectroscopic reflectometry, Microelectronic Engineering 139 (2015) 70–75.

2014

  • C. Villringer, J. Bauer, H. Lux, P. Steglich, S. Schrader, F. De Matteis, M. Casalboni, O. Fursenko, G. Lippert, G. Lupina, J. Kitzmann and M. A. Schubert:
    Optical properties of graphene determined by spectroscopic ellipsometry, reflectometry and transmission photometry,
    March 10-12 2014, Dresden, 8th Workshop Ellipsometry, Conference Poster
  • O. Fursenko, J. Bauer, S. Marschmeyer
    In-line through silicon vias etching depths inspection by spectroscopic reflectometry
    Microelectronic Engineering 122 (2014) pp. 25–28